TY - JOUR
T1 - Sensitivity of surface acoustic wave magnetic sensors composed of various Ni electrode structures
AU - Kadota, Michio
AU - Ito, Shigeo
PY - 2012/7/1
Y1 - 2012/7/1
N2 - A shear horizontal type of surface acoustic wave (SAW) magnetic sensor composed of a magnetostrictive Ni electrode and an ST-cut 90°X quartz substrate was fabricated. In this study, in order to obtain a higher magnetic sensitivity, one-port SAW resonators composed of three kinds of Ni electrode structures on the ST-cut 90°X quartz, namely, (a) grooved Ni electrodes, (b) additional overlaid Ni films on grooved Ni electrodes, and (c) Ni electrodes on the quartz, were fabricated and measured. In addition to these, a SAW resonator composed of a magnetostrictive TbFe 2 film electrode, which has a larger magnetostrictivity than the Ni film, on the ST-cut 90°X quartz was also fabricated. Their characteristics are examined.
AB - A shear horizontal type of surface acoustic wave (SAW) magnetic sensor composed of a magnetostrictive Ni electrode and an ST-cut 90°X quartz substrate was fabricated. In this study, in order to obtain a higher magnetic sensitivity, one-port SAW resonators composed of three kinds of Ni electrode structures on the ST-cut 90°X quartz, namely, (a) grooved Ni electrodes, (b) additional overlaid Ni films on grooved Ni electrodes, and (c) Ni electrodes on the quartz, were fabricated and measured. In addition to these, a SAW resonator composed of a magnetostrictive TbFe 2 film electrode, which has a larger magnetostrictivity than the Ni film, on the ST-cut 90°X quartz was also fabricated. Their characteristics are examined.
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U2 - 10.1143/JJAP.51.07GC21
DO - 10.1143/JJAP.51.07GC21
M3 - Article
AN - SCOPUS:84864719192
VL - 51
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7 PART2
M1 - 07GC21
ER -