Sensitivity of surface acoustic wave magnetic sensors composed of various Ni electrode structures

Michio Kadota, Shigeo Ito

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

A shear horizontal type of surface acoustic wave (SAW) magnetic sensor composed of a magnetostrictive Ni electrode and an ST-cut 90°X quartz substrate was fabricated. In this study, in order to obtain a higher magnetic sensitivity, one-port SAW resonators composed of three kinds of Ni electrode structures on the ST-cut 90°X quartz, namely, (a) grooved Ni electrodes, (b) additional overlaid Ni films on grooved Ni electrodes, and (c) Ni electrodes on the quartz, were fabricated and measured. In addition to these, a SAW resonator composed of a magnetostrictive TbFe 2 film electrode, which has a larger magnetostrictivity than the Ni film, on the ST-cut 90°X quartz was also fabricated. Their characteristics are examined.

Original languageEnglish
Article number07GC21
JournalJapanese journal of applied physics
Volume51
Issue number7 PART2
DOIs
Publication statusPublished - 2012 Jul 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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