Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique

S. Suzuki, S. Tuchitani, K. Sato, S. Ueno, Y. Yokota, M. Sato, M. Esashi

Research output: Contribution to journalArticlepeer-review

40 Citations (Scopus)

Abstract

A new semiconductor capacitance-type accelerometer utilizing a pulse width modulation (PWM) electrostatic servo technique has been developed. Highly accurate detection of feeble and low frequency acceleration became possible with the PWM sensing method. The limited air gaps between the movable and fixed electrodes ensured compatibility between high sensitivity and durability, while transverse sensitivity was reduced due to the symmetric structure of the sensing part.

Original languageEnglish
Pages (from-to)316-319
Number of pages4
JournalSensors and Actuators: A. Physical
Volume21
Issue number1-3
DOIs
Publication statusPublished - 1990 Feb

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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