SEM-EDX analysis ofinsulator specimen by using garment antistatic spray

Long Ze, Susumu Imashuku, Jun Kawai

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

SEM-EDX analyses of insulator samples are usually believed to be difficult because of charge-up effect, and thus carbon or gold evaporation was performed prior to the SEM observation. However, such an electric conductive thin film will emit characteristic X-rays, interfering the EDX analysis. In the present study, we report that using an anti-static spray is an easier and more effective way than using an ionic liquid. Possibility of metal corrosion by the anti-static spray should be noted.

Original languageEnglish
Pages (from-to)155-158
Number of pages4
JournalBUNSEKI KAGAKU
Volume62
Issue number2
DOIs
Publication statusPublished - 2013 Jan 1
Externally publishedYes

Keywords

  • Antistatic agent
  • Diluted ionic liquid
  • Insulator
  • SEM-EDX

ASJC Scopus subject areas

  • Analytical Chemistry

Fingerprint Dive into the research topics of 'SEM-EDX analysis ofinsulator specimen by using garment antistatic spray'. Together they form a unique fingerprint.

  • Cite this