Abstract
SEM-EDX analyses of insulator samples are usually believed to be difficult because of charge-up effect, and thus carbon or gold evaporation was performed prior to the SEM observation. However, such an electric conductive thin film will emit characteristic X-rays, interfering the EDX analysis. In the present study, we report that using an anti-static spray is an easier and more effective way than using an ionic liquid. Possibility of metal corrosion by the anti-static spray should be noted.
Original language | English |
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Pages (from-to) | 155-158 |
Number of pages | 4 |
Journal | BUNSEKI KAGAKU |
Volume | 62 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2013 Jan 1 |
Externally published | Yes |
Keywords
- Antistatic agent
- Diluted ionic liquid
- Insulator
- SEM-EDX
ASJC Scopus subject areas
- Analytical Chemistry