SEM-EDX analysis ofinsulator specimen by using garment antistatic spray

SEM-EDX analyses of insulator samples are usually believed to be difficult because of charge-up effect, and thus carbon or gold evaporation was performed prior to the SEM observation. However, such an electric conductive thin film will emit characteristic X-rays, interfering the EDX analysis. In the present study, we report that using an anti-static spray is an easier and more effective way than using an ionic liquid. Possibility of metal corrosion by the anti-static spray should be noted.