SEM-EDX analysis ofinsulator specimen by using garment antistatic spray

Long Ze; Susumu Imashuku; Jun Kawai

doi:10.2116/bunsekikagaku.62.155

SEM-EDX analysis ofinsulator specimen by using garment antistatic spray

Long Ze, Susumu Imashuku, Jun Kawai

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

SEM-EDX analyses of insulator samples are usually believed to be difficult because of charge-up effect, and thus carbon or gold evaporation was performed prior to the SEM observation. However, such an electric conductive thin film will emit characteristic X-rays, interfering the EDX analysis. In the present study, we report that using an anti-static spray is an easier and more effective way than using an ionic liquid. Possibility of metal corrosion by the anti-static spray should be noted.

Original language	English
Pages (from-to)	155-158
Number of pages	4
Journal	BUNSEKI KAGAKU
Volume	62
Issue number	2
DOIs	https://doi.org/10.2116/bunsekikagaku.62.155
Publication status	Published - 2013 Jan 1
Externally published	Yes

Keywords

Antistatic agent
Diluted ionic liquid
Insulator
SEM-EDX

ASJC Scopus subject areas

Analytical Chemistry

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author = "Long Ze and Susumu Imashuku and Jun Kawai",

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AU - Imashuku, Susumu

AU - Kawai, Jun

PY - 2013/1/1

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N2 - SEM-EDX analyses of insulator samples are usually believed to be difficult because of charge-up effect, and thus carbon or gold evaporation was performed prior to the SEM observation. However, such an electric conductive thin film will emit characteristic X-rays, interfering the EDX analysis. In the present study, we report that using an anti-static spray is an easier and more effective way than using an ionic liquid. Possibility of metal corrosion by the anti-static spray should be noted.

AB - SEM-EDX analyses of insulator samples are usually believed to be difficult because of charge-up effect, and thus carbon or gold evaporation was performed prior to the SEM observation. However, such an electric conductive thin film will emit characteristic X-rays, interfering the EDX analysis. In the present study, we report that using an anti-static spray is an easier and more effective way than using an ionic liquid. Possibility of metal corrosion by the anti-static spray should be noted.

KW - Antistatic agent

KW - Diluted ionic liquid

KW - Insulator

KW - SEM-EDX

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SEM-EDX analysis ofinsulator specimen by using garment antistatic spray

Abstract

Keywords

ASJC Scopus subject areas

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