Abstract
SEM-EDX analyses of insulator samples are usually believed to be difficult because of charge-up effect, and thus carbon or gold evaporation was performed prior to the SEM observation. However, such an electric conductive thin film will emit characteristic X-rays, interfering the EDX analysis. In the present study, we report that using an anti-static spray is an easier and more effective way than using an ionic liquid. Possibility of metal corrosion by the anti-static spray should be noted.
| Original language | English |
|---|---|
| Pages (from-to) | 155-158 |
| Number of pages | 4 |
| Journal | BUNSEKI KAGAKU |
| Volume | 62 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2013 Jan 1 |
| Externally published | Yes |
Keywords
- Antistatic agent
- Diluted ionic liquid
- Insulator
- SEM-EDX
ASJC Scopus subject areas
- Analytical Chemistry
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Cite this
Ze, L., Imashuku, S., & Kawai, J. (2013). SEM-EDX analysis ofinsulator specimen by using garment antistatic spray. BUNSEKI KAGAKU, 62(2), 155-158. https://doi.org/10.2116/bunsekikagaku.62.155