Self-supported pitch-variable guided-mode resonant grating filters at telecom wavelengths

Y. Kanamori, N. Matsuyama, J. S. Ye, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We fabricate a pitch-variable guided-mode resonant grating filter. The grating is a Si self-supported structure and expanded by opposed comb-drive actuators. The initial grating period of 860 nm is designed for a wavelength-selective filter at telecom wavelengths. By controlling the grating period, the resonant wavelength can be tuned.

Original languageEnglish
Title of host publication2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Pages99-100
Number of pages2
DOIs
Publication statusPublished - 2007 Dec 1
Event2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China
Duration: 2007 Aug 122007 Aug 16

Publication series

Name2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Other

Other2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
CountryTaiwan, Province of China
CityHualien
Period07/8/1207/8/16

Keywords

  • Comb-drive actuators
  • Guided-mode resonant grating filters
  • Subwavelength gratings
  • Wavelength-selective filters

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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