Self-sensing quartz-crystal cantilever for nanometric sensing

Yu Ching Lin; Takahito Ono; Masayoshi Esashi

doi:10.1109/SENSOR.2007.4300682

Self-sensing quartz-crystal cantilever for nanometric sensing

Yu Ching Lin, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A self-sensing cantilever of AT-cut quartz plate was developed to achieve a high sensitivity under various environments at room temperature. The cantilevers fabricated by deep reactive ion etching with metal electrodes at the both sides have the thicknesses of 20 μm. The external force at shear-vibration direction induces the resonant frequency changes at thickness-shear vibration mode. The frequency modulation (FM) detection of thickness-shear vibration was demonstrated and the sensitivity and noise lever were investigated.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	2513-2516
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300682
Publication status	Published - 2007 Dec 1
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 2007 Jun 10 → 2007 Jun 14

Publication series

Name	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country	France
City	Lyon
Period	07/6/10 → 07/6/14

Keywords

Cantilever
Frequency modulation
Quartz-crystal
Self-sensing

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2007.4300682

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Lin, Y. C., Ono, T., & Esashi, M. (2007). Self-sensing quartz-crystal cantilever for nanometric sensing. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2513-2516). [4300682] (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300682

Self-sensing quartz-crystal cantilever for nanometric sensing. / Lin, Yu Ching; Ono, Takahito; Esashi, Masayoshi.

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 2513-2516 4300682 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Lin, YC, Ono, T & Esashi, M 2007, Self-sensing quartz-crystal cantilever for nanometric sensing. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300682, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 2513-2516, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 07/6/10. https://doi.org/10.1109/SENSOR.2007.4300682

Lin YC, Ono T, Esashi M. Self-sensing quartz-crystal cantilever for nanometric sensing. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 2513-2516. 4300682. (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300682

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abstract = "A self-sensing cantilever of AT-cut quartz plate was developed to achieve a high sensitivity under various environments at room temperature. The cantilevers fabricated by deep reactive ion etching with metal electrodes at the both sides have the thicknesses of 20 μm. The external force at shear-vibration direction induces the resonant frequency changes at thickness-shear vibration mode. The frequency modulation (FM) detection of thickness-shear vibration was demonstrated and the sensitivity and noise lever were investigated.",

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Self-sensing quartz-crystal cantilever for nanometric sensing

Abstract

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Keywords

ASJC Scopus subject areas

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