@inproceedings{8c6129d9a94e47e9bb034bec6fef386c,
title = "Self-sensing quartz-crystal cantilever for nanometric sensing",
abstract = "A self-sensing cantilever of AT-cut quartz plate was developed to achieve a high sensitivity under various environments at room temperature. The cantilevers fabricated by deep reactive ion etching with metal electrodes at the both sides have the thicknesses of 20 μm. The external force at shear-vibration direction induces the resonant frequency changes at thickness-shear vibration mode. The frequency modulation (FM) detection of thickness-shear vibration was demonstrated and the sensitivity and noise lever were investigated.",
keywords = "Cantilever, Frequency modulation, Quartz-crystal, Self-sensing",
author = "Lin, {Yu Ching} and Takahito Ono and Masayoshi Esashi",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/SENSOR.2007.4300682",
language = "English",
isbn = "1424408423",
series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "2513--2516",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",
}