Self-sensing quartz-crystal cantilever for nanometric sensing

Yu Ching Lin, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A self-sensing cantilever of AT-cut quartz plate was developed to achieve a high sensitivity under various environments at room temperature. The cantilevers fabricated by deep reactive ion etching with metal electrodes at the both sides have the thicknesses of 20 μm. The external force at shear-vibration direction induces the resonant frequency changes at thickness-shear vibration mode. The frequency modulation (FM) detection of thickness-shear vibration was demonstrated and the sensitivity and noise lever were investigated.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2513-2516
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period07/6/1007/6/14

Keywords

  • Cantilever
  • Frequency modulation
  • Quartz-crystal
  • Self-sensing

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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