Self-elongated growth of nanopores in annealed amorphous Ta 2O5 films

R. Nakamura, K. Tanaka, M. Ishimaru, K. Sato, T. J. Konno, H. Nakajima

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

Nanoporous Ta2O5 films with oriented and elongated nanopores have been prepared by a technique which utilizes the accumulation of free volume during the crystallization of amorphous Ta2O5 annealed above 973 K. The transmission electron microscopy analyses revealed that voids were elongated in the [1 0 0] direction perpendicular to the longitudinal b axis of the orthorhombic structure. The self-assembly of a significant amount of oriented nanovoids can be contributed to the strong anisotropic crystal structure of orthorhombic Ta2O5.

Original languageEnglish
Pages (from-to)182-185
Number of pages4
JournalScripta Materialia
Volume66
Issue number3-4
DOIs
Publication statusPublished - 2012 Feb 1

Keywords

  • Amorphous
  • Crystallization
  • Nanoporous
  • Oxides
  • Self-assembly

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys

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