Self-calibration of lateral non-linearities of an interference microscope

Wei Gao, Xue Feng Qiang, Satoshi Kiyono

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

The accuracy of conventional interferometric methods for three-dimensional microscopy is limited by errors of intrinsic metrics inside interference microscopes. A simple self-calibration technique is proposed for evaluating linearity errors of an interference microscope in the X- and Y-directions, which result from distortions of the CCD pixel arrays and objective lens. In this self-calibration technique, an inclined flat surface is used as the specimen. Two sets of profile measurement data before and after a small shift of the specimen in the X- or Y-directions are used to obtain the linearity error in each direction. Computer simulations are carried out to analyze the influence of error sources. Experimental results of calibrating a commercially available scanning white light interference microscope are also presented.

Original languageEnglish
Pages (from-to)245-253
Number of pages9
JournalMeasurement: Journal of the International Measurement Confederation
Volume34
Issue number3
DOIs
Publication statusPublished - 2003 Oct 1

Keywords

  • Accuracy
  • Interference microscope
  • Lateral directions
  • Measurement
  • Non-linearity
  • Profile
  • Self-calibration
  • Sensor
  • Three-dimensional

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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