Self-aligned ultra thin HFO 2 CMOS transistors with high quality CVD TaN gate electrode

C. H. Lee, J. J. Lee, W. P. Bai, S. H. Bae, J. H. Sim, X. Lei, R. D. Clark, Y. Harada, Masaaki Niwa, D. L. Kwong

Research output: Contribution to conferencePaperpeer-review

22 Citations (Scopus)

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Engineering & Materials Science