TY - JOUR
T1 - Selective oxidation of the surface layer of bilayer WSe2 by laser heating
AU - Shioya, Hiroki
AU - Tsukagoshi, Kazuhito
AU - Ueno, Keiji
AU - Oiwa, Akira
N1 - Publisher Copyright:
© 2019 The Japan Society of Applied Physics.
PY - 2019
Y1 - 2019
N2 - WSe2 films have several anisotropies between the in-plane and out-of-plane directions, which affects their responses to external operation. Guided by the anisotropies, we provide adequate heat propagation to oxidize selectively the surface layer of bilayer WSe2 and characterized the structure of monolayer WSe2 covered with an oxidized layer by optical and atomic force microscopy, Raman spectroscopy and photoluminescence measurements. Furthermore, we found indications that laser treatments of monolayer WSe2 covered with an oxidized layer have possibility to cause photoactivated oxidation. Our observations suggest clues to understand low-dimensional oxidation behaviours.
AB - WSe2 films have several anisotropies between the in-plane and out-of-plane directions, which affects their responses to external operation. Guided by the anisotropies, we provide adequate heat propagation to oxidize selectively the surface layer of bilayer WSe2 and characterized the structure of monolayer WSe2 covered with an oxidized layer by optical and atomic force microscopy, Raman spectroscopy and photoluminescence measurements. Furthermore, we found indications that laser treatments of monolayer WSe2 covered with an oxidized layer have possibility to cause photoactivated oxidation. Our observations suggest clues to understand low-dimensional oxidation behaviours.
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U2 - 10.7567/1347-4065/ab50da
DO - 10.7567/1347-4065/ab50da
M3 - Article
AN - SCOPUS:85079764777
VL - 58
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 12
M1 - 120903
ER -