Selective mode excitation of piezoelectric disk-type resonator by electrodepattern definition

Takeshi Matsumura, Masayoshi Esashi, Hiroshi Harada, Florian Thalmayr, Ken Ya Hashimoto, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Contour-mode piezoelectric MEMS resonators have been widely studied as oneof potential components for future multi-band RF solution based on cognitiveradio technology, because its resonant frequency is generally determined by thesize and shape. To apply them to applications at frequency of higher thanhundreds MHz, a specific higher mode should be strongly excited. However, it isoften difficult, because the higher order vibration is a compound mode includingradial and rotational displacements. In this study, the displacementdistributions of higher order wine-glass modes of disk-type resonators werederived from FEM modal analysis. Then, mechanically-coupled disk-array filterswith baseball-type and doughnut-type electrodes were fabricated and tested.Using the doughnut-type electrodes, (2. 6) mode was selectively excited, and afilter characteristic at a center frequency of 500.3 MHz was obtained. It wasnumerically and experimentally confirmed that a well-designed electrode patternenhanced a specific vibration mode and suppressed other modes by comparingdifferent electrode patterns.

Original languageEnglish
Title of host publication2010 IEEE International Ultrasonics Symposium, IUS 2010
Pages979-982
Number of pages4
DOIs
Publication statusPublished - 2010 Dec 1
Event2010 IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States
Duration: 2010 Oct 112010 Oct 14

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Other

Other2010 IEEE International Ultrasonics Symposium, IUS 2010
CountryUnited States
CitySan Diego, CA
Period10/10/1110/10/14

Keywords

  • AlN
  • RF MEMS
  • RF filter
  • disk-type resonator
  • multi-band filter

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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    Matsumura, T., Esashi, M., Harada, H., Thalmayr, F., Hashimoto, K. Y., & Tanaka, S. (2010). Selective mode excitation of piezoelectric disk-type resonator by electrodepattern definition. In 2010 IEEE International Ultrasonics Symposium, IUS 2010 (pp. 979-982). [5935435] (Proceedings - IEEE Ultrasonics Symposium). https://doi.org/10.1109/ULTSYM.2010.5935435