Abstract
In this paper, we present the growth techniques of carbon nanotubes and its application for nano-electromechanical devices. Several methods were attempted for the selective growth of the carbon nanotubes. Catalyzed metal (Ni) patterning and the following hot-filament chemical vapor deposition enable to glow carbon nanotubes on the metal pattern formed on quartz glass. However, no carbon nanotubes are grown on a flat silicon substrate using this method. It is found that the high electrostatic field with a negative substrate bias enhances the growth of the carbon nanotubes. This growth enhancement effect is applied to fabricate single carbon nanotube tip on silicon for scanning probe microscopy.
| Original language | English |
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| Pages | 301-304 |
| Number of pages | 4 |
| Publication status | Published - 2001 Jan 1 |
| Event | 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken, Switzerland Duration: 2001 Jan 21 → 2001 Jan 25 |
Other
| Other | 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) |
|---|---|
| Country/Territory | Switzerland |
| City | Interlaken |
| Period | 01/1/21 → 01/1/25 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering