Selective growth of carbon nanotubes for nano electro mechanical device

H. Miyashita, Takahito Ono, Ngoc Minh Phan Ngoc Minh, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

4 Citations (Scopus)

Abstract

In this paper, we present the growth techniques of carbon nanotubes and its application for nano-electromechanical devices. Several methods were attempted for the selective growth of the carbon nanotubes. Catalyzed metal (Ni) patterning and the following hot-filament chemical vapor deposition enable to glow carbon nanotubes on the metal pattern formed on quartz glass. However, no carbon nanotubes are grown on a flat silicon substrate using this method. It is found that the high electrostatic field with a negative substrate bias enhances the growth of the carbon nanotubes. This growth enhancement effect is applied to fabricate single carbon nanotube tip on silicon for scanning probe microscopy.

Original languageEnglish
Pages301-304
Number of pages4
Publication statusPublished - 2001 Jan 1
Event14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken, Switzerland
Duration: 2001 Jan 212001 Jan 25

Other

Other14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001)
Country/TerritorySwitzerland
CityInterlaken
Period01/1/2101/1/25

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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