Sealed Cavity Pressure Evaluation from 1 Pa to over 10 KPA Using Thin Diaphragm for MEMS Vacuum Packaging

Muhammad Salman Al Farisi, Hideki Hirano, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This article reports a wide range vacuum evaluation system for a sealed cavity of packaged micro-devices. The measurement is based on the zero-balance method, which encompasses the measurement from its resolution to near the atmospheric pressure. The key improvement for high vacuum evaluation is the use of an intentionally tensile stressed thin Si diaphragm using high concentration boron doping to minimize the initial deflection of the diaphragm. During the pressure change operation of the zero-balance method, no diaphragm buckling which prevents high accuracy vacuum measurement is confirmed, because the flat diaphragm has a single zero-balance point, i.e. mono-stable. Such feature results in single digit Pa measurement accuracy.

Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1045-1048
Number of pages4
ISBN (Electronic)9781728116105
DOIs
Publication statusPublished - 2019 Jan
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: 2019 Jan 272019 Jan 31

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period19/1/2719/1/31

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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