Abstract
Using scanning-tunneling microscopy, the initial adsorption of monomethylsilane (MMS) on the Si(III)-7×7 surface at room temperature is investigated. From results of the statistical analysis of the number of reacted sites, it is likely that MMS reacts with the surface using rest-atom/adatom pairs.
Original language | English |
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Pages (from-to) | 1419-1421 |
Number of pages | 3 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 44 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2005 Mar |
Externally published | Yes |
Keywords
- Adsorption
- Monomethylsilane
- STM
- Si(111)-7×7
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)