Using scanning-tunneling microscopy, the initial adsorption of monomethylsilane (MMS) on the Si(III)-7×7 surface at room temperature is investigated. From results of the statistical analysis of the number of reacted sites, it is likely that MMS reacts with the surface using rest-atom/adatom pairs.
|Number of pages||3|
|Journal||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|Publication status||Published - 2005 Mar|
ASJC Scopus subject areas
- Physics and Astronomy(all)