Scanning-tunneling microscopy observation of monomethylsilane adsorption on Si(III)-7×7

Masashi Sakai, Maki Suemitsu, Yuzuru Narita

Research output: Contribution to journalArticle

Abstract

Using scanning-tunneling microscopy, the initial adsorption of monomethylsilane (MMS) on the Si(III)-7×7 surface at room temperature is investigated. From results of the statistical analysis of the number of reacted sites, it is likely that MMS reacts with the surface using rest-atom/adatom pairs.

Original languageEnglish
Pages (from-to)1419-1421
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume44
Issue number3
DOIs
Publication statusPublished - 2005 Mar 1

Keywords

  • Adsorption
  • Monomethylsilane
  • STM
  • Si(111)-7×7

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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