Scanning-tunneling microscopy observation of monomethylsilane adsorption on Si(III)-7×7

Masashi Sakai; Maki Suemitsu; Yuzuru Narita

doi:10.1143/JJAP.44.1419

Scanning-tunneling microscopy observation of monomethylsilane adsorption on Si(III)-7×7

Masashi Sakai, Maki Suemitsu, Yuzuru Narita

Information Devices Division

Research output: Contribution to journal › Article › peer-review

Abstract

Using scanning-tunneling microscopy, the initial adsorption of monomethylsilane (MMS) on the Si(III)-7×7 surface at room temperature is investigated. From results of the statistical analysis of the number of reacted sites, it is likely that MMS reacts with the surface using rest-atom/adatom pairs.

Original language	English
Pages (from-to)	1419-1421
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	44
Issue number	3
DOIs	https://doi.org/10.1143/JJAP.44.1419
Publication status	Published - 2005 Mar 1

Keywords

Adsorption
Monomethylsilane
STM
Si(111)-7×7

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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abstract = "Using scanning-tunneling microscopy, the initial adsorption of monomethylsilane (MMS) on the Si(III)-7×7 surface at room temperature is investigated. From results of the statistical analysis of the number of reacted sites, it is likely that MMS reacts with the surface using rest-atom/adatom pairs.",

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author = "Masashi Sakai and Maki Suemitsu and Yuzuru Narita",

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AU - Narita, Yuzuru

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N2 - Using scanning-tunneling microscopy, the initial adsorption of monomethylsilane (MMS) on the Si(III)-7×7 surface at room temperature is investigated. From results of the statistical analysis of the number of reacted sites, it is likely that MMS reacts with the surface using rest-atom/adatom pairs.

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KW - Monomethylsilane

KW - STM

KW - Si(111)-7×7

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ER -

Scanning-tunneling microscopy observation of monomethylsilane adsorption on Si(III)-7×7

Abstract

Keywords

ASJC Scopus subject areas

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