Scanning tunneling microscope-based local electroluminescence spectroscopy of p-AlGaAs/i-GaAs/n-AlGaAs double heterostructure

Kentaro Watanabe, Masakazu Ichikawa, Yoshiaki Nakamura, Shigeyuki Kuboya, Ryuji Katayama, Kentaro Onabe

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Local characterization of electroluminescence (EL) from working light-emitting devices is a key to developing and improving their EL properties. The authors developed a scanning tunneling microscope- (STM-) EL technique based on conductive optical fiber probe STM with homemade bipolar sample holder and we demonstrated spatially resolved STM-EL nanospectroscopy of p-AlGaAs/i-GaAs/n-AlGaAs double heterostructure (110) cross-sections. The lateral spatial resolution of the STM-EL measurement was evaluated to be about 0.9 μm, whose origin was attributed to far-field EL collection by the tapered core of the optical fiber probe. This lateral spatial resolution agrees with the estimated spatial resolution of 1.1 μm in lateral and 1.2 μm in depth.

Original languageEnglish
Article number021802
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume30
Issue number2
DOIs
Publication statusPublished - 2012 Jan 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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