Abstract
Motivated by the desire to minimize specimen damage in beam sensitive specimens, there has been a recent push toward using relatively low accelerating voltages (<100kV) in scanning transmission electron microscopy. To complement experimental efforts on this front, this paper seeks to explore the variations with accelerating voltage of the imaging dynamics, both of the channelling of the fast electron and of the inelastic interactions. High-angle annular-dark field, electron energy loss spectroscopic imaging and annular bright field imaging are all considered.
Original language | English |
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Pages (from-to) | 999-1013 |
Number of pages | 15 |
Journal | Ultramicroscopy |
Volume | 111 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2011 Jul |
Keywords
- Annular bright field (ABF)
- Electron energy-loss spectroscopy (EELS)
- High-angle annular dark field (HAADF)
- Low accelerating voltages
- Scanning transmission electron microscopy (STEM)
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Instrumentation