The microfabrication, evaluation, and application of a boron-doped diamond microscope was studied using an integrated resistive heater element. The high thermal conductivity of the diamond base supporting the heater element allows quick thermal response of 0.45 μs. A high-speed nanolithography process can be realized due to the large thermal conductivity of diamond probe.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)