Scanning probe with an integrated diamond heater element for nanolithography

Joon Hyung Bae, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

33 Citations (Scopus)

Abstract

The microfabrication, evaluation, and application of a boron-doped diamond microscope was studied using an integrated resistive heater element. The high thermal conductivity of the diamond base supporting the heater element allows quick thermal response of 0.45 μs. A high-speed nanolithography process can be realized due to the large thermal conductivity of diamond probe.

Original languageEnglish
Pages (from-to)814-816
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number5
DOIs
Publication statusPublished - 2003 Feb 3

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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