Scanning probe microscopy with quartz crystal cantilever

Takahito Ono, Ikusei Rin, Masayoshi Esashi

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12 Citations (Scopus)


This paper reports a quartz crystal cantilever for piezoelectric vibration sensing in scanning probe microscopy (SPM). SPM imaging by a frequency modulation detection method is demonstrated in ambient atmosphere using a 22.5-μm -thick cantilevered AT-cut quartz crystal with metal electrodes on both sides. The spring constant of the cantilever is calculated to be 10 Nm. Despite the low electromechanical coupling between the piezoelectric effect and the flexural vibration, a high sensitivity of 0.07 nm (Hz)0.5 to vibration is achieved in the second flexural mode. The cantilever self-oscillates on the basis of piezoelectric detection, and offers short-term stability of within approximately 0.5 Hz in ambient atmosphere at room temperature. The force curve of the self-oscillating cantilever shows that the self-oscillation can be sustained even when in contact with a sample.

Original languageEnglish
Article number074102
JournalApplied Physics Letters
Issue number7
Publication statusPublished - 2005 Aug 15

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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