TY - JOUR
T1 - Scanning photoelectron microscope for nanoscale three-dimensional spatial-resolved electron spectroscopy for chemical analysis
AU - Horiba, K.
AU - Nakamura, Y.
AU - Nagamura, N.
AU - Toyoda, S.
AU - Kumigashira, H.
AU - Oshima, M.
AU - Amemiya, K.
AU - Senba, Y.
AU - Ohashi, H.
N1 - Funding Information:
This research is supported by the Core Research for Evolutional Science and Technology (CREST) of the Japan Science and Technology Agency (JST) and the Japan Society for the Promotion of Science (JSPS) through its Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program). The authors would like to thank Semiconductor Leading Edge Technologies, Inc., (Selete) and Semiconductor Technology Academic Research Center (STARC) for providing the semiconductor samples. The synchrotron-radiation photoemission measurements were performed partly under project 08U004 at the Institute of Materials Structure Science at KEK.
PY - 2011/11
Y1 - 2011/11
N2 - In order to achieve nondestructive observation of the three-dimensional spatially resolved electronic structure of solids, we have developed a scanning photoelectron microscope system with the capability of depth profiling in electron spectroscopy for chemical analysis (ESCA). We call this system 3D nano-ESCA. For focusing the x-ray, a Fresnel zone plate with a diameter of 200 m and an outermost zone width of 35 nm is used. In order to obtain the angular dependence of the photoelectron spectra for the depth-profile analysis without rotating the sample, we adopted a modified VG Scienta R3000 analyzer with an acceptance angle of 60 as a high-resolution angle-resolved electron spectrometer. The system has been installed at the University-of-Tokyo Materials Science Outstation beamline, BL07LSU, at SPring-8. From the results of the line-scan profiles of the poly-Si/high-k gate patterns, we achieved a total spatial resolution better than 70 nm. The capability of our system for pinpoint depth-profile analysis and high-resolution chemical state analysis is demonstrated.
AB - In order to achieve nondestructive observation of the three-dimensional spatially resolved electronic structure of solids, we have developed a scanning photoelectron microscope system with the capability of depth profiling in electron spectroscopy for chemical analysis (ESCA). We call this system 3D nano-ESCA. For focusing the x-ray, a Fresnel zone plate with a diameter of 200 m and an outermost zone width of 35 nm is used. In order to obtain the angular dependence of the photoelectron spectra for the depth-profile analysis without rotating the sample, we adopted a modified VG Scienta R3000 analyzer with an acceptance angle of 60 as a high-resolution angle-resolved electron spectrometer. The system has been installed at the University-of-Tokyo Materials Science Outstation beamline, BL07LSU, at SPring-8. From the results of the line-scan profiles of the poly-Si/high-k gate patterns, we achieved a total spatial resolution better than 70 nm. The capability of our system for pinpoint depth-profile analysis and high-resolution chemical state analysis is demonstrated.
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U2 - 10.1063/1.3657156
DO - 10.1063/1.3657156
M3 - Article
C2 - 22128978
AN - SCOPUS:82555173689
VL - 82
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
SN - 0034-6748
IS - 11
M1 - 113701
ER -