Abstract
Scanning nonlinear dielectric microscopy (SNDM) with super-high resolution is described. First, experimental results on the ferroelectric domain and visualization of charge stored in flash memories are shown following a description of the theory and principle of SNDM. Next, a higher-order nonlinear dielectric imaging method (HO-SNDM) and non contact SNDM (NC-SNDM) are proposed. Using NC-SNDM, the first achievement of atomic resolution in capacitance measurement is successfully demonstrated. In addition to these techniques, a new three-dimensional (3D)-type of SNDM for measuring the 3D distribution of ferroelectric polarization has been developed. Finally, a very high density ferroelectric data storage system based on SNDM with an actual information density of 1 Tbits/in.2 is demonstrated.
| Original language | English |
|---|---|
| Pages (from-to) | 4428-4434 |
| Number of pages | 7 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 46 |
| Issue number | 7 B |
| DOIs | |
| Publication status | Published - 2007 Jul 26 |
Keywords
- Electric dipole moment
- Ferroelectric data storage
- Ferroelectric domain
- Flash memory
- Scanning nonlinear dielectric microscopy
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)