Scanning-laser-beam semiconductor pH-imaging sensor

Motoi Nakao; Tatsuo Yoshinobu; Hiroshi Iwasaki

doi:10.1016/0925-4005(93)01199-E

Scanning-laser-beam semiconductor pH-imaging sensor

Motoi Nakao, Tatsuo Yoshinobu, Hiroshi Iwasaki

Research output: Contribution to journal › Article › peer-review

104 Citations (Scopus)

Abstract

We have constructed a two-dimensional (2-D) pH-imaging sensor that enables us to observe th H⁺ distribution produced by living cells. The pH-sensing principle is similar to that of thelight-addressable potentiometric sensor. The electrolyte-insulator-semiconductor (EIS) structure (electrolyteSi₃N₄SiO₂Si) is illuminated by a focused (∼1 μm) and modulated (1-10 kHz) He-Ne laser bean from the backside of the semiconductor, and the a.c. photocurrent flowing through the EIS structure is measured. By scanning the laser beam, 2-D pH images can be obtained. By using this sensor, pH distributions of colonies of yeast (Saccharomyces cerevisiae) have been observed. The spatial resolution of this sensor could be improved by thinning the Si wafer.

Original language	English
Pages (from-to)	119-123
Number of pages	5
Journal	Sensors and Actuators: B. Chemical
Volume	20
Issue number	2-3
DOIs	https://doi.org/10.1016/0925-4005(93)01199-E
Publication status	Published - 1994 Jun
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/0925-4005(93)01199-E

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abstract = "We have constructed a two-dimensional (2-D) pH-imaging sensor that enables us to observe th H+ distribution produced by living cells. The pH-sensing principle is similar to that of thelight-addressable potentiometric sensor. The electrolyte-insulator-semiconductor (EIS) structure (electrolyteSi3N4SiO2Si) is illuminated by a focused (∼1 μm) and modulated (1-10 kHz) He-Ne laser bean from the backside of the semiconductor, and the a.c. photocurrent flowing through the EIS structure is measured. By scanning the laser beam, 2-D pH images can be obtained. By using this sensor, pH distributions of colonies of yeast (Saccharomyces cerevisiae) have been observed. The spatial resolution of this sensor could be improved by thinning the Si wafer.",

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AU - Yoshinobu, Tatsuo

AU - Iwasaki, Hiroshi

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Scanning-laser-beam semiconductor pH-imaging sensor

Abstract

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