Scanning Force Microscope using a Common-path Optical Heterodyne Interferometer

Motohito Hino, Minoru Sasaki, Kazuhiko Fujita, Yoshinori Bessho, Kazuhiro Hane, Shigeru Okuma

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


In this paper, the scanning force microscope (SFM) using optical heterodyne interferometry is reported. The birefringent double-focus lens was used as a beam splitter-recombiner, and thus, the two interfering beams passed through a common optical path and the reference plane of the interferometer was located on the sample surface. Therefore, the deflection of the cantilever was detected without being affected by the irregular movement of the stage and the environmental conditions, such as thermal and vibrational disturbances. Since the SFM system was combined with a laser interferometric microscope and a conventional optical microscope, the sample was positioned easily by the visual inspection, and it was measured by the laser interferometry.

Original languageEnglish
Pages (from-to)1853-1858
Number of pages6
JournalJournal of the Japan Society for Precision Engineering
Issue number11
Publication statusPublished - 1993
Externally publishedYes


  • SFM
  • birefringent double-focus lens
  • common-path
  • optical heterodyne interferometer
  • scanning force microscope
  • thermal and vibrational disturbances

ASJC Scopus subject areas

  • Mechanical Engineering


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