Scanning electron-beam dielectric microscopy for the investigation of the temperature coefficient distribution of dielectric ceramics

Yasuo Cho, Osamu Jintsugawa, Kazuhiko Yamanouchi

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Studies on scanning electron-beam dielectric microscopy are reported. This microscopy technique is used for determining the temperature coefficient distribution of dielectric materials using an electron beam as a heat source instead of a light beam as in photothermal dielectric microscopy. This microscopy technique, which has the ability to simultaneously observe SEM images and the material composition by EPMA, has a resolution better than that of photothermal dielectric microscopy. To demonstrate the usefulness of this technique, the two-dimensional image of a two-phase composite ceramic composed of TiO2 and Bi2Ti4O11 is measured.

Original languageEnglish
Pages (from-to)1299-1301
Number of pages3
JournalJournal of the American Ceramic Society
Volume83
Issue number5
DOIs
Publication statusPublished - 2000

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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