Scanning diamond probe and application to thermo-mechanical nanolithography

Joon Hyung Bae, Takahito Ono, Chihiro Konoma, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)

Abstract

This paper describes the fabrication, evaluation and application of a boron-doped diamond micro-probe with an integrated resistive heater element. The diamond heater with a pyramidal tip, which is bridged at the end of two diamond beams, can be electrically heated by flowing a DC or AC current. The high thermal conductivity of the diamond base supporting the heater element allows a very quick thermal response of 0.45 μsec. The hard-wearing sharp diamond tip formed by silicon-lost mold technique shows excellent durability in contact operation with a sample. Demonstration of thermo-mechanical nanolithography with this heated probe exhibits line patterns with the feature size of 40 nm on a Polymethylmethacrylate (PMMA) film and transferred pits-pattern with the diameter of 230 nm and the pitch of 400 nm onto a silicon substrate.

Original languageEnglish
Pages24-27
Number of pages4
Publication statusPublished - 2003 Jul 23
EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
Duration: 2003 Jan 192003 Jan 23

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
CountryJapan
CityKyoto
Period03/1/1903/1/23

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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