SAW magnetic sensors composed of various Ni electrode structures on quartz

Michio Kadota, Shigeo Ito, Yoshihiro Ito, Takuo Hada, Kenjiro Okaguchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A shear horizontal type of surface acoustic wave (SAW) magnetic sensor composed of a Ni electrode of magnetrostrictive metal and an ST-cut 90°X quartz (propagation direction: perpendicular to X-axis) substrate was fabricated. In order to obtain a higher magnetic sensitivity, one-port SAW resonators composed of 3 kinds of Ni electrodes structures on the quartz, such as (a) grooved Ni electrodes, (b) additional overlaid Ni films on grooved Ni electrodes, and (c) Ni electrodes on the quartz, were fabricated. Their sensitivities were almost same, but the SAW resonator composed of (c) structure had highest Q. Using this SAW resonator, a passive, battery-less, and wireless communication system was realized.

Original languageEnglish
Title of host publication2011 IEEE International Ultrasonics Symposium, IUS 2011
Pages805-809
Number of pages5
DOIs
Publication statusPublished - 2011 Dec 1
Event2011 IEEE International Ultrasonics Symposium, IUS 2011 - Orlando, FL, United States
Duration: 2011 Oct 182011 Oct 21

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2011 IEEE International Ultrasonics Symposium, IUS 2011
Country/TerritoryUnited States
CityOrlando, FL
Period11/10/1811/10/21

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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