Saving energy and natural resource by micro-nanomachining

Masayoshi Esashi

Research output: Contribution to conferencePaper

4 Citations (Scopus)

Abstract

Micro-nanomachining technologies have been studied with the aim of saving energy and natural resources. Wafer process packaging using electrical feedthrough in glass has been applied to micromechanical sensors as electrostatically levitating micro motors (10,000 rpm) for rotational gyroscopes. Maintenance tools as active catheters have been developed to be used in narrow space for extended life. Technologies for compact power source as fabrication of ceramic microstructures using silicon mold and as measurement of hydrogen storage capacity of carbon nanotube were developed.

Original languageEnglish
Pages220-227
Number of pages8
Publication statusPublished - 2002 Jan 1
Event15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States
Duration: 2002 Jan 202002 Jan 24

Other

Other15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
CountryUnited States
CityLas Vegas, NV
Period02/1/2002/1/24

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Esashi, M. (2002). Saving energy and natural resource by micro-nanomachining. 220-227. Paper presented at 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, Las Vegas, NV, United States.