Saturated adsorption of PH3 on Si(100):P and its application to digital control of phosphorus coverage on Si(100) surface

Y. Tsukidate, M. Suemitsu

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

Abstract

Si(100) surface, when fully saturated with PH3 at room temperature, shows up θP = 0.25 ML and θH = 0.75 ML. Based on this fact, a method has been developed to digitally control the phosphorus coverage as θP = 1-(0.75)n, where n is the number of sequence consisting of saturated adsorption of PH3 and thermal desorption of H2. The good agreement of the experiment with this formula indicates that PH3 molecules do not chemisorb at P sites at room temperatures.

Original languageEnglish
Pages (from-to)148-152
Number of pages5
JournalApplied Surface Science
Volume151
Issue number1
DOIs
Publication statusPublished - 1999 Sep

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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