Sandwich-type ferromagnetic RF integrated inductor

Masahiro Yamaguchi; Makoto Baba; Ken Ichi Arai

doi:10.1109/22.971617

Sandwich-type ferromagnetic RF integrated inductor

Masahiro Yamaguchi, Makoto Baba, Ken Ichi Arai

ENG - Electrical Engineering

Research output: Contribution to journal › Article › peer-review

109 Citations (Scopus)

Abstract

The first demonstration of a sandwich-type ferromagnetic RF integrated spiral inductor for the 2-GHz range is reported. Two ferromagnetic CoNbZr films were set to sandwich the spiral in order to enhance the amount of magnetic flux linkage across the coil current. The stresses given from the insulator to the ferromagnetic film were studied. The inductance L of 7.9 nH and the qualify factor Q of 12.7 were obtained for a 200 μm × 400 μm size four-turn rectangular spiral at f = 2 GHz. The inductance was better than that of an air core of the same coil size by 19%, and the Q was better by 23%. Comparison with the on-top magnetic film type was also discussed.

Original language	English
Pages (from-to)	2331-2335
Number of pages	5
Journal	IEEE Transactions on Microwave Theory and Techniques
Volume	49
Issue number	12
DOIs	https://doi.org/10.1109/22.971617
Publication status	Published - 2001 Dec

Keywords

Inductors
Integrated circuit fabrication
Magnetic films
Magnetic resonance
Magnetic susceptibility

ASJC Scopus subject areas

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

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title = "Sandwich-type ferromagnetic RF integrated inductor",

abstract = "The first demonstration of a sandwich-type ferromagnetic RF integrated spiral inductor for the 2-GHz range is reported. Two ferromagnetic CoNbZr films were set to sandwich the spiral in order to enhance the amount of magnetic flux linkage across the coil current. The stresses given from the insulator to the ferromagnetic film were studied. The inductance L of 7.9 nH and the qualify factor Q of 12.7 were obtained for a 200 μm × 400 μm size four-turn rectangular spiral at f = 2 GHz. The inductance was better than that of an air core of the same coil size by 19%, and the Q was better by 23%. Comparison with the on-top magnetic film type was also discussed.",

keywords = "Inductors, Integrated circuit fabrication, Magnetic films, Magnetic resonance, Magnetic susceptibility",

author = "Masahiro Yamaguchi and Makoto Baba and Arai, {Ken Ichi}",

note = "Funding Information: Manuscript received March 21, 2001; revised August 26, 2001. This work was supported in part by the Japan Society of Promotion of Science under the Grant-in-Aid for Scientific Research 12305025 and under the Grant-in-Aid for Scientific Research Priority Areas (A), “Highly Functionized Global Interface Integration,” 13025202.",

year = "2001",

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doi = "10.1109/22.971617",

language = "English",

volume = "49",

pages = "2331--2335",

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T1 - Sandwich-type ferromagnetic RF integrated inductor

AU - Yamaguchi, Masahiro

AU - Baba, Makoto

AU - Arai, Ken Ichi

N1 - Funding Information: Manuscript received March 21, 2001; revised August 26, 2001. This work was supported in part by the Japan Society of Promotion of Science under the Grant-in-Aid for Scientific Research 12305025 and under the Grant-in-Aid for Scientific Research Priority Areas (A), “Highly Functionized Global Interface Integration,” 13025202.

PY - 2001/12

Y1 - 2001/12

N2 - The first demonstration of a sandwich-type ferromagnetic RF integrated spiral inductor for the 2-GHz range is reported. Two ferromagnetic CoNbZr films were set to sandwich the spiral in order to enhance the amount of magnetic flux linkage across the coil current. The stresses given from the insulator to the ferromagnetic film were studied. The inductance L of 7.9 nH and the qualify factor Q of 12.7 were obtained for a 200 μm × 400 μm size four-turn rectangular spiral at f = 2 GHz. The inductance was better than that of an air core of the same coil size by 19%, and the Q was better by 23%. Comparison with the on-top magnetic film type was also discussed.

AB - The first demonstration of a sandwich-type ferromagnetic RF integrated spiral inductor for the 2-GHz range is reported. Two ferromagnetic CoNbZr films were set to sandwich the spiral in order to enhance the amount of magnetic flux linkage across the coil current. The stresses given from the insulator to the ferromagnetic film were studied. The inductance L of 7.9 nH and the qualify factor Q of 12.7 were obtained for a 200 μm × 400 μm size four-turn rectangular spiral at f = 2 GHz. The inductance was better than that of an air core of the same coil size by 19%, and the Q was better by 23%. Comparison with the on-top magnetic film type was also discussed.

KW - Inductors

KW - Integrated circuit fabrication

KW - Magnetic films

KW - Magnetic resonance

KW - Magnetic susceptibility

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SN - 0018-9480

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ER -

Sandwich-type ferromagnetic RF integrated inductor

Abstract

Keywords

ASJC Scopus subject areas

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