Safe membrane-releasing process for thermoelectric hydrogen gas sensor

L. F. Houlet, W. Shin, M. Nishibori, N. Izu, T. Itoh, I. Matsubara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present here a safe membrane-releasing process in KOH for the fabrication of a high performance freestanding device and the mass production of a single membrane device for the hydrogen gas sensing application. The fabricated devices are thermoelectric hydrogen gas sensors based on the thermoelectric detection of the catalytic hydrogen combustion. The free-standing device has a voltage response 2.7 times higher than the single membrane device. The proposed membrane-releasing process, which combines black wax and a KOH protective polymer coat, shows fabrication yields of 31%, 50% for the free-standing device and 47% for the single-membrane device produced in mass.

Original languageEnglish
Title of host publicationThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Pages1032-1035
Number of pages4
DOIs
Publication statusPublished - 2007
Externally publishedYes
Event6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
Duration: 2007 Oct 282007 Oct 31

Publication series

NameProceedings of IEEE Sensors

Other

Other6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Country/TerritoryUnited States
CityAtlanta, GA
Period07/10/2807/10/31

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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