Rutherford backscattering spectrometry of electrically charged targets: Elegant technique for measuring charge-state distribution of backscattered ions

Katsumi Takahiro, Atsushi Terai, Kiyoshi Kawatsura, Hiroshi Naramoto, Shunya Yamamoto, Bun Tsuchiya, Shinji Nagata, Fumitaka Nishiyama

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We found that surface charging during Rutherford backscattering spectrometry (RBS) of sapphire enabled us to measure the charge-state distribution of ions backscattered at the surface. For a Cu/Au-deposited Al 2O3 sample, two components, higherand lower-energy ones, were resolved on both Cu and Au peaks in the RBS random spectrum. For a single-crystalline Al2O3 sample, a double-peak structure was clearly observed on both Al and O surface peaks in the RBS aligned spectrum. The charge-state distribution can be obtained from the intensity of each component The results obtained here were compared with previous data for the equilibrium charge-state distribution.

Original languageEnglish
Pages (from-to)1823-1825
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number3 A
DOIs
Publication statusPublished - 2006 Mar 8

Keywords

  • Backscattered ions
  • Charge state
  • Equilibrium charge state
  • Rutherford backscattering spectrometry
  • Surface charging
  • Surface peak

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Rutherford backscattering spectrometry of electrically charged targets: Elegant technique for measuring charge-state distribution of backscattered ions'. Together they form a unique fingerprint.

  • Cite this