Rotational infrared polarization modulator using a MEMS-based air turbine with different types of journal bearing

Motoaki Hara, Shuji Tanaka, Masayoshi Esashi

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

This paper describes rotational infrared polarization modulators using a micro-electromechanical-system-based (MEMS-based) air turbine with different types of journal bearing. Three types of journal bearing, circular, symmetrical two-lobed and asymmetrical seven-lobed journal bearing, were compared. Using an optical displacement meter and a high speed camera, it was confirmed that all turbines exhibit three modes of rotation: (a) low speed mode, (b) intermediate mode and (c) high speed mode in this order, when decreasing N2 flow rate to an aerostatic thrust bearing. In the low speed mode, the rotor is lifted up by excess flow to the thrust bearing, making a contact with an upper layer. In the high speed mode, the rotor is levitated without any contact to the upper and lower layers by balanced flow to the thrust bearing, and the maximum rotational speed of 74 000 rpm was achieved using the asymmetrical seven-lobed bearing. The rotation in this mode is, however, discontinuous due to the collision between the rotor and the journal bearing. It was concluded that a journal bearing with sufficient load capacity is necessary for continuous high speed rotation.

Original languageEnglish
Pages (from-to)223-228
Number of pages6
JournalJournal of Micromechanics and Microengineering
Volume13
Issue number2
DOIs
Publication statusPublished - 2003 Mar 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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