Roll/Pitch Rate Integrating MEMS Gyroscope Using Dynamically Balanced Dual-Mass Resonator

Shihe Wang, Muhammad Salman Al Farisi, Takashiro Tsukamoto, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An in-plane and out-of-plane 2-axis resonator is required for a roll/pitch rate integrating gyroscope (RIG), which is much more challenging in design and fabrication compared with an in-plane 2-axis resonator used in a yaw RIG. In this study, we propose a dynamically balanced out-of-plane resonator to increase the out-of-plane quality factor (Q-factor). A balanced dual-mass structure is designed to reduce the torque applied to the supporting substrate, and thus increase the Q-factor of the out-of-plane mode. Design optimization for frequency matching, reducing mechanical deformation and increasing Q-factor through finite element method (FEM) simulation has been demonstrated. Manufacturing method of the device employing Au-Au thermo-compression bonding has been developed. The fabricated resonator oscillated at around 4380 Hz after remove by using an externally stacked piezoelectric actuator and laser Doppler vibrometer (LDV).

Original languageEnglish
Title of host publicationINERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728129839
DOIs
Publication statusPublished - 2020 Mar
Event7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020 - Hiroshima, Japan
Duration: 2020 Mar 232020 Mar 26

Publication series

NameINERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020
CountryJapan
CityHiroshima
Period20/3/2320/3/26

Keywords

  • Dynamically balanced
  • Gyroscope
  • Out-of-Plane

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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