Role of ultra thin SiOx layer on epitaxial YSZ/SiOx/Si thin film as multi functional buffer layer by nano-probe and in-situ TEM investigation

Takanori Kiguchi, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)89-96
Number of pages8
JournalIntegrated Ferroelectrics
Volume45
DOIs
Publication statusPublished - 2002

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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