@article{a3fe02da86e24d88baa137bdf03867db,
title = "Role of ultra thin SiOx layer on epitaxial YSZ/SiOx/Si thin film as multi functional buffer layer by nano-probe and in-situ TEM investigation",
author = "Takanori Kiguchi and Naoki Wakiya and Kazuo Shinozaki and Nobuyasu Mizutani",
note = "Copyright: Copyright 2018 Elsevier B.V., All rights reserved.",
year = "2002",
doi = "10.1080/713718205",
language = "English",
volume = "45",
pages = "89--96",
journal = "Integrated Ferroelectrics",
issn = "1058-4587",
publisher = "Taylor and Francis Ltd.",
}