Role of SrTiO3 seed layer on low-temperature crystallization of Pb(Zr, Ti)O3 films prepared by metalorganic chemical vapor deposition

Ji Won Moon, Naoki Wakiya, Takanori Kiguchi, Tomohiko Yoshioka, Tanaka Junzo, Kazuo Shinozaki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The role of SrTiO3 seed layer on low-temperature crystallization of Pb(Zr, Ti)O3 (PZT) film was investigated. The SrTiO3 seeds were prepared by pulsed laser deposition (PLD) with the temperature range of 400-600°C and PZT films were prepared by thermal MOCVD. The pyrochlore free PZT films can be successfully crystallized at around 340°C on SrTiO3 seed layers by thermal MOCVD. It was found that the role of SrTiO3 seed layer is not only pyrochlore suppression but also perovskite promotion. It is also considered that crystallinity, surface coverage and seed layer thickness are important parameters for low-temperature crystallization and electrical properties of PZT films.

Original languageEnglish
Title of host publicationFerroelectrics, Multiferroics, and Magnetoelectrics
Pages121-126
Number of pages6
Volume1034
Publication statusPublished - 2008 Dec 1
Event2007 MRS Fall Meeting - Boston, MA, United States
Duration: 2007 Nov 262007 Nov 30

Other

Other2007 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period07/11/2607/11/30

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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