Role of high-k interlayer in ZrO2/high-k/ZrO2 insulating multilayer on electrical properties for DRAM capacitor

T. Onaya, T. Nabatame, T. Sawada, K. Kurishima, N. Sawamoto, A. Ohi, T. Chikyow, A. Ogura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Role of high-k interlayer in ZrO<sub>2</sub>/high-k/ZrO<sub>2</sub> insulating multilayer on electrical properties for DRAM capacitor'. Together they form a unique fingerprint.

Engineering & Materials Science