Role of hetero interface of ionic/covalent oxides for Pt/high-k/SiO 2/Si MOS capacitors on Vfb shift

Toshihide Nabatame, Akihiko Ohi, Toyohiro Chikyow

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Role of hetero interface of ionic/covalent oxides for Pt/high-k/SiO 2/Si MOS capacitors on Vfb shift'. Together they form a unique fingerprint.

Engineering & Materials Science