Rh-nanoparticle-dispersed ZrO 2 films prepared by laser chemical vapor deposition

Akihiro Honda; Teiichi Kimura; Akihiko Ito; Takashi Goto

doi:10.1016/j.surfcoat.2011.12.038

Rh-nanoparticle-dispersed ZrO ₂ films prepared by laser chemical vapor deposition

Akihiro Honda, Teiichi Kimura, Akihiko Ito, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Rhodium-nanoparticle-dispersed zirconia (Rh/ZrO ₂) films were prepared by laser chemical vapor deposition using Rh and Zr dipivaloylmethanate precursors. The effects of deposition conditions and heat treatment on the microstructures of ZrO ₂ and Rh/ZrO ₂ films were investigated. At a deposition temperature of 1180K and a Rh to Zr source molar ratio (R _Rh/Zr) of 0.05, Rh nanoparticles precipitated on the surface of a (020)-oriented ZrO ₂ matrix having a feather-like structure. The diameter of the Rh nanoparticles increased from 25 to 70nm as R _Rh/Zr increased from 0.01 to 0.10. The microstructure of the Rh nanoparticles and the feather-like structure of the ZrO ₂ matrix were unchanged after heat treatment at 873K in air for 10h.

Original language	English
Pages (from-to)	3006-3010
Number of pages	5
Journal	Surface and Coatings Technology
Volume	206
Issue number	11-12
DOIs	https://doi.org/10.1016/j.surfcoat.2011.12.038
Publication status	Published - 2012 Feb 15

Keywords

Feather-like structure
Laser chemical vapor deposition
Rh nanoparticles
ZrO film

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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title = "Rh-nanoparticle-dispersed ZrO 2 films prepared by laser chemical vapor deposition",

abstract = "Rhodium-nanoparticle-dispersed zirconia (Rh/ZrO 2) films were prepared by laser chemical vapor deposition using Rh and Zr dipivaloylmethanate precursors. The effects of deposition conditions and heat treatment on the microstructures of ZrO 2 and Rh/ZrO 2 films were investigated. At a deposition temperature of 1180K and a Rh to Zr source molar ratio (R Rh/Zr) of 0.05, Rh nanoparticles precipitated on the surface of a (020)-oriented ZrO 2 matrix having a feather-like structure. The diameter of the Rh nanoparticles increased from 25 to 70nm as R Rh/Zr increased from 0.01 to 0.10. The microstructure of the Rh nanoparticles and the feather-like structure of the ZrO 2 matrix were unchanged after heat treatment at 873K in air for 10h.",

keywords = "Feather-like structure, Laser chemical vapor deposition, Rh nanoparticles, ZrO film",

author = "Akihiro Honda and Teiichi Kimura and Akihiko Ito and Takashi Goto",

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T1 - Rh-nanoparticle-dispersed ZrO 2 films prepared by laser chemical vapor deposition

AU - Honda, Akihiro

AU - Kimura, Teiichi

AU - Ito, Akihiko

AU - Goto, Takashi

PY - 2012/2/15

Y1 - 2012/2/15

N2 - Rhodium-nanoparticle-dispersed zirconia (Rh/ZrO 2) films were prepared by laser chemical vapor deposition using Rh and Zr dipivaloylmethanate precursors. The effects of deposition conditions and heat treatment on the microstructures of ZrO 2 and Rh/ZrO 2 films were investigated. At a deposition temperature of 1180K and a Rh to Zr source molar ratio (R Rh/Zr) of 0.05, Rh nanoparticles precipitated on the surface of a (020)-oriented ZrO 2 matrix having a feather-like structure. The diameter of the Rh nanoparticles increased from 25 to 70nm as R Rh/Zr increased from 0.01 to 0.10. The microstructure of the Rh nanoparticles and the feather-like structure of the ZrO 2 matrix were unchanged after heat treatment at 873K in air for 10h.

AB - Rhodium-nanoparticle-dispersed zirconia (Rh/ZrO 2) films were prepared by laser chemical vapor deposition using Rh and Zr dipivaloylmethanate precursors. The effects of deposition conditions and heat treatment on the microstructures of ZrO 2 and Rh/ZrO 2 films were investigated. At a deposition temperature of 1180K and a Rh to Zr source molar ratio (R Rh/Zr) of 0.05, Rh nanoparticles precipitated on the surface of a (020)-oriented ZrO 2 matrix having a feather-like structure. The diameter of the Rh nanoparticles increased from 25 to 70nm as R Rh/Zr increased from 0.01 to 0.10. The microstructure of the Rh nanoparticles and the feather-like structure of the ZrO 2 matrix were unchanged after heat treatment at 873K in air for 10h.

KW - Feather-like structure

KW - Laser chemical vapor deposition

KW - Rh nanoparticles

KW - ZrO film

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