Rh-nanoparticle-dispersed ZrO 2 films prepared by laser chemical vapor deposition

Akihiro Honda, Teiichi Kimura, Akihiko Ito, Takahi Goto

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


Rhodium-nanoparticle-dispersed zirconia (Rh/ZrO 2) films were prepared by laser chemical vapor deposition using Rh and Zr dipivaloylmethanate precursors. The effects of deposition conditions and heat treatment on the microstructures of ZrO 2 and Rh/ZrO 2 films were investigated. At a deposition temperature of 1180K and a Rh to Zr source molar ratio (R Rh/Zr) of 0.05, Rh nanoparticles precipitated on the surface of a (020)-oriented ZrO 2 matrix having a feather-like structure. The diameter of the Rh nanoparticles increased from 25 to 70nm as R Rh/Zr increased from 0.01 to 0.10. The microstructure of the Rh nanoparticles and the feather-like structure of the ZrO 2 matrix were unchanged after heat treatment at 873K in air for 10h.

Original languageEnglish
Pages (from-to)3006-3010
Number of pages5
JournalSurface and Coatings Technology
Issue number11-12
Publication statusPublished - 2012 Feb 15


  • Feather-like structure
  • Laser chemical vapor deposition
  • Rh nanoparticles
  • ZrO film

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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