TY - JOUR
T1 - Rh-nanoparticle-dispersed ZrO 2 films prepared by laser chemical vapor deposition
AU - Honda, Akihiro
AU - Kimura, Teiichi
AU - Ito, Akihiko
AU - Goto, Takahi
N1 - Funding Information:
This research was supported in part by the Global COE Program of Materials Integration, Tohoku University , and Toyota Central R&D Labs . It was also supported in part by the Japan Society for the Promotion of Science, Grant-in-Aid for Young Scientists (B), 22760550 , and the Ministry of Education, Science, Sports and Culture of Japan, Grant-in-Aid for Scientific Research (A), 22246082 .
PY - 2012/2/15
Y1 - 2012/2/15
N2 - Rhodium-nanoparticle-dispersed zirconia (Rh/ZrO 2) films were prepared by laser chemical vapor deposition using Rh and Zr dipivaloylmethanate precursors. The effects of deposition conditions and heat treatment on the microstructures of ZrO 2 and Rh/ZrO 2 films were investigated. At a deposition temperature of 1180K and a Rh to Zr source molar ratio (R Rh/Zr) of 0.05, Rh nanoparticles precipitated on the surface of a (020)-oriented ZrO 2 matrix having a feather-like structure. The diameter of the Rh nanoparticles increased from 25 to 70nm as R Rh/Zr increased from 0.01 to 0.10. The microstructure of the Rh nanoparticles and the feather-like structure of the ZrO 2 matrix were unchanged after heat treatment at 873K in air for 10h.
AB - Rhodium-nanoparticle-dispersed zirconia (Rh/ZrO 2) films were prepared by laser chemical vapor deposition using Rh and Zr dipivaloylmethanate precursors. The effects of deposition conditions and heat treatment on the microstructures of ZrO 2 and Rh/ZrO 2 films were investigated. At a deposition temperature of 1180K and a Rh to Zr source molar ratio (R Rh/Zr) of 0.05, Rh nanoparticles precipitated on the surface of a (020)-oriented ZrO 2 matrix having a feather-like structure. The diameter of the Rh nanoparticles increased from 25 to 70nm as R Rh/Zr increased from 0.01 to 0.10. The microstructure of the Rh nanoparticles and the feather-like structure of the ZrO 2 matrix were unchanged after heat treatment at 873K in air for 10h.
KW - Feather-like structure
KW - Laser chemical vapor deposition
KW - Rh nanoparticles
KW - ZrO film
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U2 - 10.1016/j.surfcoat.2011.12.038
DO - 10.1016/j.surfcoat.2011.12.038
M3 - Article
AN - SCOPUS:84856439441
VL - 206
SP - 3006
EP - 3010
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 11-12
ER -