TY - JOUR
T1 - RF integrated noise suppressor using soft magnetic films
AU - Kim, Ki Hyeon
AU - Ohnuma, Shigehiro
AU - Yamaguchi, Masahiro
N1 - Funding Information:
Manuscript received October 15, 2003. This work was supported in part by the Telecommucations Advancement Organization of Japan and in part by the Ministry of Education, Culture, Sports, Science and Technology.
PY - 2004/7
Y1 - 2004/7
N2 - RF integrated noise suppressors were fabricated by integration of soft magnetic films on coplanar transmission lines. The vertical structure of suppressor was composed of the magnetic film (2 mm × 15 mm × 1, 2 μm)/2-μm-thick polyimide/15.2-mm-long and 3-μm-thick Cu transmission line/seed layer (Ti/Cu)/1 mm-thick glass substrate. The coplanar transmission lines were prepared by electroplated Cu with 50 Ω-characteristic impedance. The width of the signal line was 50 μm. The magnetic films, e.g., CoPdAlO and CoNbZr films were deposited by rf magnetron sputtering. Compared with those of the nonintegrated noise suppressor, the magnitude of signal attenuation at resonance point of integrated noise suppressor greatly increased from - 4 to - 30 dB for the 1-μm-thick CoNbZr film, and from - 15 to - 57 dB for the 2-μm-thick CoPdAlO film, respectively.
AB - RF integrated noise suppressors were fabricated by integration of soft magnetic films on coplanar transmission lines. The vertical structure of suppressor was composed of the magnetic film (2 mm × 15 mm × 1, 2 μm)/2-μm-thick polyimide/15.2-mm-long and 3-μm-thick Cu transmission line/seed layer (Ti/Cu)/1 mm-thick glass substrate. The coplanar transmission lines were prepared by electroplated Cu with 50 Ω-characteristic impedance. The width of the signal line was 50 μm. The magnetic films, e.g., CoPdAlO and CoNbZr films were deposited by rf magnetron sputtering. Compared with those of the nonintegrated noise suppressor, the magnitude of signal attenuation at resonance point of integrated noise suppressor greatly increased from - 4 to - 30 dB for the 1-μm-thick CoNbZr film, and from - 15 to - 57 dB for the 2-μm-thick CoPdAlO film, respectively.
KW - Coplanar transmission
KW - Ferromagnetic resonance (FMR)
KW - Radio-frequency (RF) noise suppression
KW - Soft magnetic film
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U2 - 10.1109/TMAG.2004.830474
DO - 10.1109/TMAG.2004.830474
M3 - Article
AN - SCOPUS:4444225869
VL - 40
SP - 2838
EP - 2840
JO - IEEE Transactions on Magnetics
JF - IEEE Transactions on Magnetics
SN - 0018-9464
IS - 4 II
ER -