Revolution of sensors in micro-electromechanical systems

Masayoshi Esashi

Research output: Contribution to journalReview article

24 Citations (Scopus)

Abstract

Microsensors realized by micro-electromechanical systems (MEMS) technology play a key role as the input devices of systems. In this report, the following sensors are reviewed: piezoresistive and capacitive pressure sensors, surface acoustic wave (SAW) wireless pressure sensors, tactile sensor networks for robots, accelerometers, angular velocity sensors (gyroscopes), range image sensors using optical scanners, infrared imagers, chemical sensing systems as Fourier transform infrared (FTIR) spectroscopy and gas chromatography, flow sensors for fluids, and medical sensors such as ultrafine optical-fiber blood pressure sensors and implantable pressure sensors.

Original languageEnglish
Article number080001
JournalJapanese journal of applied physics
Volume51
Issue number8 PART 1
DOIs
Publication statusPublished - 2012 Aug 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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