Revisiting the silicon-lattice in the high-density 3D-LSIs - In the perspective of device reliability

M. Murugesan, Takafumi Fukushima, Jichoru Be, Kanuku Ri, Tetsu Tanaka, Mitsumasa Koyanagi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

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