Recent quantitative transmission electron microscopy (TEM) performed with imaging plates was reviewed according to the experimental results obtained by the author and his colleagues. First of all, characteristics of imaging plates for high-energy electrons, such as S/N and DQE were discussEd. Taking account of the characteristics and by combining the imaging plate system with the computer network system, quantitative analysis of high-resolution electron microscope (HREM) images and electron diffraction patterns could be extensively carried out In the analysis of HREM images, residual indices between observed and calculated images of W8Ta2O29were evaluated to determine the experimental conditions accurately. As an example of the analysis of electron diffraction patterns, the change of the thermal diffuse scattering of an Au thin film was accurately evaluated as a function of temperature. Finally the weak diffuse scattering in Gao.47In0.53As was analyzed by utilizing an energy filter to remove the background due to the plasmon scattering.
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Physical and Theoretical Chemistry