Review of the applications of x-ray refraction and the x-ray waveguide phenomenon to estimation of film structures

Kouichi Hayashi

Research output: Contribution to journalReview articlepeer-review

2 Citations (Scopus)

Abstract

Based on our previous work, I review the applications of x-ray refraction and the x-ray waveguide phenomenon to organic and inorganic thin films in the present paper. Under grazing incidence conditions, observations of refracted x-rays and guided x-rays due to the x-ray waveguide phenomenon provide information about thin film structures, and thus have potential as alternative methods to x-ray reflectivity. To date, we have measured the spectra of the refracted x-rays and guided x-rays from end faces of thin films using white incident x-ray beams, and utilized them for the determination of film density and thickness. Some of this work is summarized in the present paper. At the end of this paper, I describe our recent achievement in this field, namely the in situ measurement of guided x-rays during the film degradation process due to strong synchrotron radiation damage. Moreover, I discuss the perspective of the present technique from the viewpoint of micro-characterization and real-time estimation of thin films.

Original languageEnglish
Article number474006
JournalJournal of Physics Condensed Matter
Volume22
Issue number47
DOIs
Publication statusPublished - 2010 Dec 1

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'Review of the applications of x-ray refraction and the x-ray waveguide phenomenon to estimation of film structures'. Together they form a unique fingerprint.

Cite this