Review of fabrication and characterization of Nd-Fe-B thick films for magnetic micromachines

M. Nakano, S. Sato, F. Yamashita, T. Honda, J. Yamasaki, K. Ishiyama, M. Itakura, J. Fidler, T. Yanai, H. Fukunaga

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Abstract

Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 μm/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)max of approximately 120 kJ/m3, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the Isotropic films were introduced.

Original languageEnglish
Pages (from-to)2672-2676
Number of pages5
JournalIEEE Transactions on Magnetics
Volume43
Issue number6
DOIs
Publication statusPublished - 2007 Jun

Keywords

  • Laser ablation
  • Micromachines
  • Micromotors
  • Thick film devices

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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