Reuse of scalmgo4 substrates utilized for halide vapor phase epitaxy of gan

Kazuki Ohnishi, Shigeyuki Kuboya, Tomoyuki Tanikawa, Takuya Iwabuchi, Kazuya Yamamura, Noriyuki Hasuike, Hiroshi Harima, Tsuguo Fukuda, Takashi Matsuoka

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Physics & Astronomy

Engineering & Materials Science