Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy

Yusuke Kawai; Takahito Ono; Masayoshi Esashi; Ernst Meyer; Christoph Gerber

doi:10.1063/1.2748394

Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy

Yusuke Kawai, Takahito Ono, Masayoshi Esashi, Ernst Meyer, Christoph Gerber

ENG - Mechanical Systems Engineering

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

A high frequency silicon resonator for dynamic scanning force microscopy is combined with an integrated piezoelectric actuation element for large displacements. A high resonance frequency is required for imaging on the nanometer scale, and a large displacement is needed for the chemical analysis of the material at the end of the probe. The small piezoelectric resonator is formed at the end of a long piezoelectric actuator using a silicon micromachining technology. The resonator can be oscillated at 96.4 kHz, and the actuator generates a maximum displacement of 15 μm at the end of the probe. The dynamic-mode scanning force microscopy capability, using the integrated piezoelectric resonator, is demonstrated on a 2 μm pitch Au grating.

Original language	English
Article number	063709
Journal	Review of Scientific Instruments
Volume	78
Issue number	6
DOIs	https://doi.org/10.1063/1.2748394
Publication status	Published - 2007

ASJC Scopus subject areas

Instrumentation

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10.1063/1.2748394

Cite this

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title = "Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy",

abstract = "A high frequency silicon resonator for dynamic scanning force microscopy is combined with an integrated piezoelectric actuation element for large displacements. A high resonance frequency is required for imaging on the nanometer scale, and a large displacement is needed for the chemical analysis of the material at the end of the probe. The small piezoelectric resonator is formed at the end of a long piezoelectric actuator using a silicon micromachining technology. The resonator can be oscillated at 96.4 kHz, and the actuator generates a maximum displacement of 15 μm at the end of the probe. The dynamic-mode scanning force microscopy capability, using the integrated piezoelectric resonator, is demonstrated on a 2 μm pitch Au grating.",

author = "Yusuke Kawai and Takahito Ono and Masayoshi Esashi and Ernst Meyer and Christoph Gerber",

note = "Funding Information: This work is supported in part by Future Medical Engineering based on Bionanotechnology 21st century COE Program, Tohoku University and also supported in part by a Grant-in Aid for Scientific Research from the Japanese Ministry of Education, Culture, Sports, Science and Technology of Japan. A part of this work was performed at the Micro/nanomachining Research Education Center, Tohoku University. Further funding was provided by the National Center of Competence in Research on Nanoscale Science and the Swiss National Science Foundation.",

year = "2007",

doi = "10.1063/1.2748394",

language = "English",

volume = "78",

journal = "Review of Scientific Instruments",

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publisher = "American Institute of Physics Publising LLC",

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TY - JOUR

T1 - Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy

AU - Kawai, Yusuke

AU - Ono, Takahito

AU - Esashi, Masayoshi

AU - Meyer, Ernst

AU - Gerber, Christoph

N1 - Funding Information: This work is supported in part by Future Medical Engineering based on Bionanotechnology 21st century COE Program, Tohoku University and also supported in part by a Grant-in Aid for Scientific Research from the Japanese Ministry of Education, Culture, Sports, Science and Technology of Japan. A part of this work was performed at the Micro/nanomachining Research Education Center, Tohoku University. Further funding was provided by the National Center of Competence in Research on Nanoscale Science and the Swiss National Science Foundation.

PY - 2007

Y1 - 2007

N2 - A high frequency silicon resonator for dynamic scanning force microscopy is combined with an integrated piezoelectric actuation element for large displacements. A high resonance frequency is required for imaging on the nanometer scale, and a large displacement is needed for the chemical analysis of the material at the end of the probe. The small piezoelectric resonator is formed at the end of a long piezoelectric actuator using a silicon micromachining technology. The resonator can be oscillated at 96.4 kHz, and the actuator generates a maximum displacement of 15 μm at the end of the probe. The dynamic-mode scanning force microscopy capability, using the integrated piezoelectric resonator, is demonstrated on a 2 μm pitch Au grating.

AB - A high frequency silicon resonator for dynamic scanning force microscopy is combined with an integrated piezoelectric actuation element for large displacements. A high resonance frequency is required for imaging on the nanometer scale, and a large displacement is needed for the chemical analysis of the material at the end of the probe. The small piezoelectric resonator is formed at the end of a long piezoelectric actuator using a silicon micromachining technology. The resonator can be oscillated at 96.4 kHz, and the actuator generates a maximum displacement of 15 μm at the end of the probe. The dynamic-mode scanning force microscopy capability, using the integrated piezoelectric resonator, is demonstrated on a 2 μm pitch Au grating.

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DO - 10.1063/1.2748394

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JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 6

M1 - 063709

ER -

Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy

Abstract

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