TY - GEN
T1 - Resonating quartz-crystal cantilever for force sensing
AU - Rin, Ikusei
AU - Ono, Takahito
AU - Esashi, Masayoshi
PY - 2005/12/1
Y1 - 2005/12/1
N2 - A thin triangular cantilever sensor of AT-cut quartz crystal with a capability of self-sensing of vibration has been developed for force and nanometric sensing. The cantilevers fabricated by deep reactive ion etching with metal electrodes at the both sides have the thicknesses of 16-20 um. Its force sensing principle using the quartz cantilever is based on the resonant frequency changes in the case that an external force is applied. The resonant frequency of shear vibration, up to 100.75 MHz, in the direction of the electrical axis is piezoelectrically excited, which is characterized by impedance measurements. The temperature property, frequency stability in resonance and Q factor stabilities show that the triangular cantilever sensor has a high potential ability for use in ambient atmosphere at room temperature. The 1st flexural vibration signal 118kHz of the cantilever was modulated into the thickness-shear vibration signal with a detection voltage of 5μV.
AB - A thin triangular cantilever sensor of AT-cut quartz crystal with a capability of self-sensing of vibration has been developed for force and nanometric sensing. The cantilevers fabricated by deep reactive ion etching with metal electrodes at the both sides have the thicknesses of 16-20 um. Its force sensing principle using the quartz cantilever is based on the resonant frequency changes in the case that an external force is applied. The resonant frequency of shear vibration, up to 100.75 MHz, in the direction of the electrical axis is piezoelectrically excited, which is characterized by impedance measurements. The temperature property, frequency stability in resonance and Q factor stabilities show that the triangular cantilever sensor has a high potential ability for use in ambient atmosphere at room temperature. The 1st flexural vibration signal 118kHz of the cantilever was modulated into the thickness-shear vibration signal with a detection voltage of 5μV.
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U2 - 10.1109/ICSENS.2005.1597686
DO - 10.1109/ICSENS.2005.1597686
M3 - Conference contribution
AN - SCOPUS:33847318781
SN - 0780390563
SN - 9780780390560
T3 - Proceedings of IEEE Sensors
SP - 260
EP - 264
BT - Proceedings of the Fourth IEEE Conference on Sensors 2005
T2 - Fourth IEEE Conference on Sensors 2005
Y2 - 31 October 2005 through 3 November 2005
ER -