Resonant thermal sensor for a living cell in liquid

Naoki Inomata, Masaya Toda, Masaaki Sato, Akihiko Ishijima, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

High-sensitive heat detection sensor with a microfluidic chip is proposed, fabricated and evaluated, and also heat detection of a brown fat cell (BFC) has been demonstrated. The measurement principle relies on resonant thermal sensor, where the resonant frequency of a Si resonator changes due to incident heat to the resonator from a sample in water via a heat guide. The surrounding of the resonant thermal sensor is evacuated in vacuum area for minimizing the heat loss. The fabricated sensor has 1.6 mK of the temperature resolution, and 6.2 pJ of the detectable heat. As the result of the thermal measurement of the single BFC with stimulation, continuous heat production is observed. We show that this thermally insulated resonant thermal sensor has a high sensitivity, and is applicable to the observation of the thermogenic activity of a cell.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages108-111
Number of pages4
DOIs
Publication statusPublished - 2012 May 7
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 2012 Jan 292012 Feb 2

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
CountryFrance
CityParis
Period12/1/2912/2/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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