Resonant sensors by silicon micromachining

Masayoshi Esashi

Research output: Contribution to journalConference article

21 Citations (Scopus)

Abstract

Micromachined silicon resonant sensors as infrared sensor, accelerometer, angular rate sensor and AFM probe were developed. The resonator is encapsulated in a vacuum chamber in a glass-silicon structure. Vibrating beams are driven electrostatically and their movements are detected capacitively.

Original languageEnglish
Pages (from-to)609-614
Number of pages6
JournalProceedings of the Annual IEEE International Frequency Control Symposium
Publication statusPublished - 1996 Dec 1
EventProceedings of the 1996 50th IEEE International Frequency Control Symposium - Honolulu, HI, USA
Duration: 1996 Jun 51996 Jun 7

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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