Resonant magnetic sensor using magnetic gradient field formed by permalloy concentrator

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports a novel resonant magnetic sensor using a magnetic gradient field formed by a magnetic concentrator consisted of asymmetric and facing two permalloy plates. A Si cantilever with a size of 5×15×200 μm3 is placed between the gap of the magnetic concentrator, and a 10μm-diameter magnetic particle is placed on the tip of the cantilever. The resonant frequency changes as the magnetic force is impinged on the magnetic particle by the magnetic field gradient formed by the magnetic concentrator. The extremal magnetic field can be measured from the resonant frequency change. The resonant magnetic sensor is fabricated by conventional microfabrication techniques, and the magnetic force-depended resonant frequency change is evaluated under the self-oscillation condition. The experimental magnetic resolution was estimated to be 5.1×10-7 T considering the experimental noise level (3.29 ppm). By downsizing the cantilever and optimizing the permalloy concentrator, this resonant magnetic sensor has a feasibility to achieve a magnetic field resolution of 1.7 ×10-14 T.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages822-825
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 2017 Jul 26
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 2017 Jun 182017 Jun 22

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

Keywords

  • Magnetic concentrator
  • Magnetic gradient
  • Permalloy
  • Resonant magnetic sensor

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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