Resonant acoustic microsensor for photoacoustic detection

Imran Latif, Zhonglie An, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes the development of a photoacoustic microsensor for noninvasive glucose monitoring in human blood. The microsensor, based on capacitive sensing, is comprised of a resonant type cantilevered sensing element, sensitive to acoustic pressure and a rigid back plate electrode. Both parts of the sensor are fabricated separately. To eliminate external biasing requirement, an electret is formed on the back plate electrode using CYTOP. The fabricated sensing element and the back plate electrode are packaged in a housing for evaluation. In this study three different types of cantilevered sensing structures have been designed and tested. Based on the experimental study of the cantilever structures a novel photoacoustic microsensor has been fabricated and evaluated.

Original languageEnglish
Title of host publication16th International Conference on Nanotechnology - IEEE NANO 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages925-927
Number of pages3
ISBN (Electronic)9781509039142
DOIs
Publication statusPublished - 2016 Nov 21
Event16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan
Duration: 2016 Aug 222016 Aug 25

Publication series

Name16th International Conference on Nanotechnology - IEEE NANO 2016

Other

Other16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
CountryJapan
CitySendai
Period16/8/2216/8/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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