Abstract
A silicon (Si) micro electro mechanical system (MEMS) package using a lightly-doped Si chip carrier for coplanar waveguide (CPW) microwave and millimeter-wave integrated circuits (MMICs) is proposed in order to reduce parasitic problems of leakage, coupling, and resonance. The proposed chip carrier scheme is verified by fabricating and measuring a high resistivity silicon (MRS, 10 kΩ·cm) CPW on three types of carriers (conductor-back metal, lightly-doped Si, and HRS) in the frequency range 0.5 to 40 GHz. The proposed MEMS package using the lightly-doped (15 Ω·cm) Si chip carrier and the HRS shows the low loss and resonance-free since the lightly-doped Si chip carrier effectively absorbs and suppresses the resonant leakage. The Si MEMS package for CPW MMICs has an insertion loss (S 21) of 2.0 dB, a reflection loss (S 11) of 10 dB, and a power loss (PL) of 6.0 dB up to 40 GHz.
| Original language | English |
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| Title of host publication | TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers |
| Pages | 427-432 |
| Number of pages | 6 |
| Volume | 1 |
| Publication status | Published - 2005 Nov 9 |
| Event | 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 2005 Jun 5 → 2005 Jun 9 |
Other
| Other | 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 |
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| Country | Korea, Republic of |
| City | Seoul |
| Period | 05/6/5 → 05/6/9 |
Keywords
- CPW
- HRS
- MEMS
- Package
- Si
ASJC Scopus subject areas
- Engineering(all)